This presentation was made at the 2019 NAFEMS World Congress in Quebec Canada

Resource Abstract

The advancement of microelectromechanical resonator technology has been an important factor in the development of sensors and filters for mobile communication over the last three decades. Surface acoustic wave (SAW) and bulk acoustic wave (BAW) resonator optimization has enabled the transition to 4G broadband cellular networks. Now designs with ever higher Q-factors are needed to meet the requirements of 5G communication. SAW and BAW transducers use piezoelectric materials to convert between electric and mechanical energy, thus simulating these devices requires the solution of coupled electromechanical equations. This paper describes methods that have been developed for multiphysics simulation of MEMS resonators within an efficient FEA solver deployed on a cloud HPC platform. The solver has been specifically developed to take advantage of distributed memory resources available on the cloud, allowing broadband simulation of models of 200-million degrees-of-freedom in a single day cycle.